摘要 |
PROBLEM TO BE SOLVED: To easily adjust the position of a neck in a chamber, greatly improve an operation efficiency and readily adjust the attaching direction of the chamber. SOLUTION: A neck part 12 is provided so that its protruding amount can be adjusted relative to a chamber main body 11. After the chamber main body 11 is attached once to hanging bolts 80, only the position of the neck part 12 is adjusted to move the neck part to the connecting position to an outlet port 60. Thus, the entire body of a chamber may not be moved, so that a labor for adjusting all the chamber by inserting the hand of an operator into the chamber main body 11 through the neck part 12 can be saved. |