| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine motion mechanism apparatus and a scanning type probe microscope which can lessen a load of a fine motion mechanism, secure a space for setting of an optical microscope that can observe a measuring part, and project light from an optical detection system to the same point of a rear face even when a cantilever moves. SOLUTION: The apparatus has a cantilever 17 with a probe 16, X, Y, Z fine motion mechanisms 12, 13, 14 finely moving the probe, etc., and an optical detecting device detecting a bend deformation amount of the cantilever 17. The Z fine motion mechanism 14 is fixed to the Y fine motion mechanism 13, and the cantilever 17 is fixed to the Z fine motion mechanism 14. The optical detecting device includes a first reflecting part 33 reflecting light from a light source 31 in approach, retreat directions, a second reflecting part 39 projecting the reflecting light to a rear face of the cantilever 17, a third reflecting part 45 reflecting the reflecting light from the cantilever 17 in approach, retreat directions, and a fourth reflecting part 35 bringing the reflecting light into a photodetector 37. The light source 31, photodetector 37, first reflecting part 33 and fourth reflecting part 35 are fixed to the Y fine motions mechanism 13, and the second reflecting part 39 and third reflecting part 45 are fixed to the Z fine motion mechanism 14. |
