APPARATUS FOR TRANSFERRING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To transfer substrates between a substrate processor and a plurality of substrate storage cassettes by providing a cassette carrier stage movable between a substrate cassette entrance position and a substrate takeout position, using substrate transferring means. SOLUTION: A substrate storage cassette 3 housing substrates 10 to be treated is transferred to a cassette carrier stage 4 having a cassette table 5. Substrate transferring means 2 is provided for transferring the substrate 10 from the cassette 3 to a substrate processor 6. The cassette carrier stage 4 can be esp. ready for entering the substrate cassette and taking out the substrate, using the transferring means 2 and practically is made movable between the positions for entering the cassette 3 and taking out the substrate 10 by the substrate transferring means 2.