INACTIVE GAS SUPPLY EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To prevent oxygen content within a clean room from lowering from a prescribed value by gaseous nitrogen leaking from a clean stocker. SOLUTION: A gaseous nitrogen supply pipe 14 supplying gaseous nitrogen N2 to a buffer tank 10 installed within a clean room 1 is connected with a high pressure side pressure reducing valve 15, shutoff valve 16 and a lower pressure side pressure reducing valve 17. A gaseous nitrogen supply main pipe 11 supplying gaseous nitrogen N2 to a clean stocker 2 is connected with the buffer tank 10. This equipment is provided with an oxygen content indicating controller 19 imparting a valve closing command V2 to the shutoff valve 16 when oxygen content within the clean room 1 becomes lower than a prescribed value, a pressure indicating controller 18 imparting a valve closing command V1 to the shutoff valve 16 when pressure of the buffer tank 10 becomes higher than a prescribed value and a gaseous nitrogen exhaust pipe 21 provided with a safety valve 20 to discharge gaseous nitrogen N2 from the buffer tank 10 to the outdoors.