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发明名称
HEAT-TREATMENT DEVICE
摘要
申请公布号
JPH11135447(A)
申请公布日期
1999.05.21
申请号
JP19970311171
申请日期
1997.10.28
申请人
TOKYO ELECTRON LTD
发明人
SHIMAZU TOMOHISA
分类号
H01L21/22;H01L21/205;H01L21/31;H01L21/324;(IPC1-7):H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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