| 摘要 |
PROBLEM TO BE SOLVED: To provide a two-dimensional stage having a small height dimension by assembling at least a single moving means and at least another single moving means at a side portion of a supporting base so as to move each carrying base in first and second directions respectively. SOLUTION: A carrying base 12 and a moving device (expansion actuator) 14 move two-dimensionally relative to a supporting base 16 when a voltage is applied to a piezoelectric element of an actuator 14 and thus they move two-dimensionally relative to the supporting base and thus they act as moving parts 38. A stage 10 is equipped with an vibration actuator 14 at the side surface portion of the carrying base 12 and thus it is not necessary to assemble a vibration actuator 14 and the carrying base 12 in height direction, so that the height dimension of the whole of the stage 10 is small. Also, abrasion of contact surfaces of the carrying base 12 and supporting base 16 can be prevented by an abrasion-resistant material layer 36 so that the stable movement can be obtained for a long period of time. |
