摘要 |
<p>PROBLEM TO BE SOLVED: To provide a liquid crystal display device, in which irregularities in the characteristic of a pixel transistor inside a laser shot due to irregularities in the characteristic of the pixel transistor between laser shots or due to the contamination or the like of an optical system can be evaluated easily, without measuring the characteristic of the pixel transistor. SOLUTION: A liquid crystal display device is provided with a pixel transistor, which comprises a semiconductor film in which an amorphous semiconductor film formed on an insulating substrate 1, is changed into a polycrystalline by a laser crystallization method. It is provided with a MOS capacitor for inspection, which is provided with an intrinsic semiconductor region 12a formed on the insulating substrate 1, with a metal electrode 15 formed on the intrinsic semiconductor reign 12a, via an insulating film 4 and with an impurity semiconductor region 12b formed on the insulating substrate 1, so as to come into contact with the intrinsic semiconductor region 12a.</p> |