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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH11135636(A)
申请公布日期
1999.05.21
申请号
JP19970298212
申请日期
1997.10.30
申请人
HITACHI LTD
发明人
HORIUCHI MITSUAKI
分类号
H01L21/82;(IPC1-7):H01L21/82
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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