摘要 |
PROBLEM TO BE SOLVED: To easily and accurately detect an uneven and wavy defect on the surface of an object to be inspected such as a photoreceptor drum. SOLUTION: A defect-detecting device has a phase change detection means 1 that projects stripe-shaped pattern light with the repeating property of shading of at least two grades or more onto the surface of an object 10 to be inspected at a fixed inclination angleθthat is not in parallel with the uneven direction of the surface, and detects phase change in the uneven direction of a projection stripe pattern that is the reflected light of the stripe-shaped pattern light from the surface of the object 10 to be inspected, and a defect detection means 2 that detects the uneven and wavy defect on the surface of the object 10 to be inspected based on the amount of the phase change being detected by the phase change detection means 1.
|