PATTERN ALIGNER OF ROLL TO BE PROCESSED

摘要

PROBLEM TO BE SOLVED: To execute accurate alignment in the case of directly performing multiple exposure by beam scanning. SOLUTION: The roll 100 to be processed whose surfaces coated with a resist layer is fixed by a chuck 10. An index M is drawn at the end of a process surface 110. An index detection means 50 optically detects that an index M comes to a specified position while the roll 100 is rotated by a rotating and driving means 20. At such a time, the rotational angle displacement amountΔθof the index M is decided based on a rotational angle signalθgiven from a rotary encoder 40. By giving the raster data of a pattern prepared in a pattern data storage means 70 to an exposing beam irradiation means 30 in timing in accordance with the displacement amountΔθ, the position of the starting point of the pattern plotting on the surface 110 is set to be the same every time.