| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe control apparatus which can surely adjust a distance between a probe and a sample in a short time by simultaneously driving three separated extension/contraction parts. SOLUTION: A plurality of fine movement parts set at a plurality of extension/contraction parts 23, 24, 25 each consisting of a piezoelectric element of a multistage actuator 20 are adapted to drive independently in accordance with a required distance between a probe 26 and a sample 27. Moreover, a hermetic chamber can be formed by the extension/contraction parts 23, 24, 25. Therefore, the sample 27 can be measured in a required stable ambience. |
