发明名称 LEAD FRAME, SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要 PROBLEM TO BE SOLVED: To prevent position deviation of a semiconductor element bonded on a die pad, by providing the structure wherein a shape-memory alloy, which becomes the protruding shape to the specified height by specified temperature, is provided on the die pad of a lead frame. SOLUTION: In the manufacturing method of a shape-memory alloy 4, after the shape-memory alloy 4 is inputted between irregular dies and formed in the L shape, the shape-memory alloy 4 is flattened by a flat mold at room temperature. Then, at first, a lead frame is placed on a fixing jig 5. Thereafter, bonding agent 6 is applied on a die pad 2, to which the shape-memory alloy 4 is welded. Then, a semiconductor element 7 is mounted on the applied bonding agent 6 and bonded. The semiconductor element 7 on the soft bonding agent 6 receives the accuracy and the vibration of the device in mounting and generates position deviation. Then, the shape-memory alloy 4 is recovered in the vicinity of 85 deg.C at the time of heating by the hardening of the bonding agent and becomes L shape. The semiconductor element 7 generating the position deviation is fixed, and the position deviation is eliminated. Thus, the bonding agent 6 is completely hardened.
申请公布号 JPH11135705(A) 申请公布日期 1999.05.21
申请号 JP19970311114 申请日期 1997.10.28
申请人 NEC KYUSHU LTD 发明人 SHINTANI TADAYUKI
分类号 H01L21/60;H01L23/50 主分类号 H01L21/60
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