| 摘要 |
PROBLEM TO BE SOLVED: To detect a defect with high sensitivity within the dispersion range by detecting edge points of an object to be inspected, connecting the edge points to obtain the shape of the object to be inspected, detecting the abrupt direction change of the edge points, and judging the quality of the shape. SOLUTION: An image input section 2 receives an object as an image and stores image data in an image memory 3. An edge detection section 20 is provided at the next stage of the image memory 3, and it binalizes the image data and detects edges via image preprocessing for extracting black/white change points to obtain edge point images. An edge trace section 21 traces the edge point images to obtain a continued edge image as an outline image. A judgment section 22 obtains the x, y-coordinates of the edge points from the outline image, selects and specifies an edge point near the central object edge point, and calculates the angle with the object edge point from the coordinate values. A defect can be detected from the angle and the interval between the edge points, thereby the defect can be detected with high sensitivity. |
