| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce space required for keeping in a sealed type substrate carrier and to reduce the installation area of a substrate processor using the substrate carrier. SOLUTION: A first handle 2A is disposed within a half surface on one side in the width direction on the first side face of a sealed container (pod main body) 1, and a second handle 2B is disposed within the half surface to be point symmetrical to the disposed side of the first handle 2A on the first side face 1a on a second side face 1b facing the first side face 1a. When arranging the plural pieces of these substrate carriers side by side, since the first handle 2A and the second handle 2B alternate with each other, the interval of the pod main bodies 1 is shortened.</p> |
