| 摘要 |
PROBLEM TO BE SOLVED: To secure both frequency and filter characteristics as desired and to improve the line width accuracy of a comb-like electrode by setting the electrode finger directions of the comb-like electrode in non-parallel to each other on both sides and accordingly reducing the difference of center frequency between the surface acoustic wave(SAW) devices. SOLUTION: When an SAW device 2b is produced, the 2nd exposure ultraviolet rays are reflected and scattered on an IDT electrode 3a of an SAW device 2a that is first produced. This reflecting/scattering direction is vertical to the electrode finger directions of the electrode 3a. If the directions of electrode fingers of both devices 2a and 2b are overlapping each other, for example, the rays reflected and scattered by the electrode 3a are made incident in the line width directions of fingers of an IDT electrode 3b and therefore directly affect the line widths of the electrode digitals. In this respect, the directions of electrode fingers are set in non-parallel to each other forming an angleθbetween the directions. As a result, the intensity of the ultraviolet rays incident in the line width directions of the fingers of the electrode 3b are reduced according to an angleθand accordingly the line width accuracy is not easily deteriorated. Thus, the difference of center frequency can be reduced between both devices 2a and 2b.
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