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发明名称
SUBSTRATE SURFACE TREATMENT, FILM FORMATION AND FILM FORMATION APPARATUS
摘要
申请公布号
JPH11135435(A)
申请公布日期
1999.05.21
申请号
JP19970294144
申请日期
1997.10.27
申请人
SONY CORP
发明人
HASHIZUME TETSUSHI
分类号
H01L21/205;H01L21/203;H01L21/304;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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