| 摘要 |
PROBLEM TO BE SOLVED: To provide an efficient and highly stable electron emission element by arranging a film to be an electron emission portion on a conductive layer or between the conductive layers. SOLUTION: By arranging plural electrode portions 2, 3, an electrode portions 2,3-arranged conduction layer 4, and a film 5 on a conductive layers or between conductive layers, electrons are effectively emitted, and highly stable electron emission can be obtained. In a formation process of a diamond film or a film 5 mainly composed of diamond to be an electron emission portion, by providing a process distributing grain diamond of 0.2μor less in average grain size, and a process causing the diamond to additionally grow into the grain diamond, the diamond film very suitable for electron emission material is arranged on the conductive layer or between conductive layers with excellent reproducibility so that a highly efficient electron emission element can be easily formed.
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