发明名称 SYSTEM AND METHOD FOR CURING A RESIN DISPOSED BETWEEN A TOP AND BOTTOM SUBSTRATE WITH THERMAL MANAGEMENT
摘要 <p>A system and method cure a combination of a top (6) and a bottom (6) substrate with a resin (8) disposed in-between. A cure platform (1500) includes a chuck on which the combination rests. A cure device (1700) cures the resin. An actuation assembly (1560) separates the chuck (1530) from the platform to thermally isolate the chuck during a curing operation performed by the cure device. A post cooling assembly may be provided to cool the chuck and the combination after a curing operation is performed by the cure device.</p>
申请公布号 WO1999024258(A1) 申请公布日期 1999.05.20
申请号 US1998024106 申请日期 1998.11.12
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