| 摘要 |
<p>A method for producing a NOx sensor comprises the steps of forming electrodes (24, 40, 50) on ceramic green sheets, and stacking and integrating the ceramic green sheets into one unit followed by sintering to prepare a substrate (300), wherein an oxygen concentration is controlled to be not more than 0.5 % in a sintering atmosphere after removal of a binder in the step of sintering the substrate (300). Specifically, the sintering is performed in an atmospheric atmosphere in Interval 1 in which the temperature in a furnace is changed from room temperature to about 1000 DEG C, and the sintering is performed in a nitrogen atmosphere (oxygen concentration in the atmosphere in the furnace is controlled to be about 400 ppm) in Interval 2 in which the temperature is changed from 1000 DEG C to a maximum temperature followed by spontaneous radiational cooling. Accordingly, it is possible to suppress alloy formation on a detecting electrode (40) for detecting a measurement gas component (for example, NOx), and it is possible to improve the measurement accuracy of the NOx sensor. <IMAGE></p> |
