发明名称 |
Focus detection system and method |
摘要 |
<p>A method of focusing a beam of coherent radiation from a source (1). The method comprises passing the beam through a focusing system (9) onto a surface; adjusting the focusing system (9); and monitoring the performance of the source (1). <IMAGE></p> |
申请公布号 |
EP0916441(A1) |
申请公布日期 |
1999.05.19 |
申请号 |
EP19970309178 |
申请日期 |
1997.11.14 |
申请人 |
FUJIFILM ELECTRONIC IMAGING LIMITED |
发明人 |
HICKS, MICHAEL ERNEST |
分类号 |
B23K26/04;B23K26/42;G02B7/28;H01S3/00;H01S3/10;(IPC1-7):B23K26/04 |
主分类号 |
B23K26/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|