发明名称 NEGATIVE PHOTORESIST COMPOSITIONS AND USE THEREOF
摘要 <p>A negative-working photoresist composition comprising 1,4-dihydropyridine derivative as a photosensitive material and a polyamic acid, a heat-resisting photoresist composition comprising a photosensitive polyamic acid which is excellent in sensitivity and resolution and can be easily developed with an aqueous alkali solution is provided. The negative-working photoresist composition contains a polyamic acid and a 1,4-dihydropyridine derivative represented by following formula (I): &lt;CHEM&gt; wherein Ar represents an aromatic group having a nitro group at the ortho-position; R&lt;1&gt; represents an alkylene group having from 1 to 5 carbon atoms; and R&lt;2&gt;, R&lt;3&gt;, R&lt;4&gt;, and R&lt;5&gt; each represents a hydrogen atom or an alkyl group having from 1 to 4 carbon atoms.</p>
申请公布号 EP0917001(A1) 申请公布日期 1999.05.19
申请号 EP19970933042 申请日期 1997.07.28
申请人 NITTO DENKO CORPORATION 发明人 FUJII, HIROFUMI;HAYASHI, SHUNICHI
分类号 G03F7/038;G03F7/004;H01L21/027;(IPC1-7):G03F7/038 主分类号 G03F7/038
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