MATERIAL VAPOR DEPOSITION

摘要

PROBLEM TO BE SOLVED: To easily and economically form a thin coating film on a substrate. SOLUTION: This method is composed of a stage in which at least one stabilizing soln. of a preferable compd. and a solvent is produced, a stage in which a substrate 5 is arranged at the inside of a vacuum depositing chamber 2, a stage in which the mist of the stabilizing soln. is produced by using ultrasonic vibration and a stage in which the mist is flowed into the vacuum depositing chamber 2 proximately to the substrate 5 by using a nozzle device 8 in such a manner that the mist adheres onto the substrate 5 to form a layer of the stabilizing soln.