PRECISION SUBSTRATE HOLDER

摘要

PROBLEM TO BE SOLVED: To provide a substrate holder capable of securely holding a substrate by improving the amount of deflection of the substrate holder set in a substrate container caused due to impact at the time of falling. SOLUTION: A substrate holder 1 capable of holding sheet-shaped precision substrates stored in a precision substrate container comprises an engaging part engaged with the precision substrate container and a rib 2 holding sheet-shaped precise substrates 3. Also at least a part of the substrate holder is reinforced with a reinforcing material 4. In addition, at least a part of it is formed with an elastic resin material having a rigid part 5 brought in contact elastically with the inner surfaces of the precision substrate container.