发明名称 |
Tunneling rotation sensor |
摘要 |
Various structures for cantilever beam tunneling rate gyro devices formed on a single substrate are disclosed. A cantilever electrode having a plurality of portions extending from the substrate with one end of the cantilever is suspended above the substrate at a distance from a tunneling electrode so that a tunneling current flows through the cantilever and tunneling electrode in response to an applied bias voltage. The cantilever and tunneling electrodes form a circuit that produces an output signal. A force applied to the sensor urges the cantilever electrode to deflect relative to the tunneling electrode to modulate the output signal. The output signal is a control voltage that is applied between the cantilever electrode and a control electrode to maintain a constant tunneling current. In the preferred embodiment, two cantilever portions extend from the wafer surface forming a Y-shape. In a further embodiment, a strap is fabricated on the cantilever electrode. In an alternate embodiment, a ridge emitter is formed such that it remains under the cantilever electrode during lateral motion of the cantilever. In an alternate embodiment, a cantilever having a varying width is fabricated.
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申请公布号 |
US5905202(A) |
申请公布日期 |
1999.05.18 |
申请号 |
US19970977702 |
申请日期 |
1997.11.25 |
申请人 |
HUGHES ELECTRONICS CORPORATION |
发明人 |
KUBENA, RANDALL L.;ATKINSON, GARY M.;CHALLONER, DORIAN;SUNADA, WALLACE |
分类号 |
G01C19/56;G01P9/04;G01P15/08;G01P15/13;G01P15/18;G01P21/00;(IPC1-7):G01P9/04 |
主分类号 |
G01C19/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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