| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a SiC-coated carbon material that has excellent resistance to shock and corrosion and is suitably useful as a material for heat treatment in semiconductor production. SOLUTION: This is a carbon material, as base material, that is coated with SiC layers on its surface where the SiC coating layers comprises 3 coating layers of the innermost SiC-coating layer (1), the outermost SiC coating layer (3) and the intermediate SiC coating layer (2) between the innermost (1) and the outermost (3) layers and the innermost layer has an average particle size of 2-5μm, the outermost layer has 10-30μm and the intermediate layer has the particle sizes changing from that of the innermost layer on the side surface contacting with the innermost layer to that of the outermost layer on the side surface contacting with the outermost layer. In a preferred embodiment, the Si-coating layers are 20-40μm thick and these coating layers (1)-(3) occupy individually 40-80%, 10-30% and 10-30% in thickness based on the total thickness.</p> |
