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发明名称
COATER
摘要
申请公布号
JPH11128812(A)
申请公布日期
1999.05.18
申请号
JP19970314632
申请日期
1997.10.31
申请人
TOKYO ELECTRON LTD
发明人
SAKAI MITSUHIRO
分类号
G03F7/16;B05C11/08;B05D1/40;H01L21/027;(IPC1-7):B05C11/08
主分类号
G03F7/16
代理机构
代理人
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地址
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