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发明名称
METHOD AND DEVICE FOR SUPPLYING SOURCE GAS
摘要
申请公布号
JPH11131237(A)
申请公布日期
1999.05.18
申请号
JP19970300003
申请日期
1997.10.31
申请人
SONY CORP
发明人
KURIHARA HISAAKI
分类号
B01J4/00;C23C16/44;C23C16/448;H01L21/205;H01L21/31;H01L21/365;(IPC1-7):C23C16/44
主分类号
B01J4/00
代理机构
代理人
主权项
地址
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