| 发明名称 |
Wire saw and slicing method thereof |
| 摘要 |
The crystal orientation of a workpiece is determined and a tilt angle of the workpiece is adjusted based on the determined crystal orientation at the outside of a wire saw, and then the workpiece is attached to a workpiece feed table of the wire saw so that the slicing can be started.
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| 申请公布号 |
US5904136(A) |
申请公布日期 |
1999.05.18 |
| 申请号 |
US19970866097 |
申请日期 |
1997.05.30 |
| 申请人 |
TOKYO SEIMITSU CO., LTD. |
发明人 |
NAGATSUKA, SHINJI;SHIBAOKA, SHINJI;TSUCHISHIMA, JIRO |
| 分类号 |
B28D5/00;B28D5/04;H01L21/304;(IPC1-7):B28D1/08 |
主分类号 |
B28D5/00 |
| 代理机构 |
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