摘要 |
PROBLEM TO BE SOLVED: To extremely improve abrasion resistance and to lengthen service life by covering a surface of the lapping carrier with a surface layer part. SOLUTION: A lapping carrier 1 has a laminating structure of body parts 8 and surface layer parts 7, 7'. The surface layer parts 7, 7' are formed from electrolyte containing diamond grains by electrolytic-gilding or Ni, an alloy such as NiCo or NiFe containing these grains. Because this gilding layer is about 3 μm in thickness and contains diamond grains, this layer is excellent in abrasion resistance. Gilding by this lapping carrier extremely improves grinding accuracy and manufacturing yield. |