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发明名称
APPARATUS FOR PULLING SINGLE CRYSTAL
摘要
申请公布号
JPH11130585(A)
申请公布日期
1999.05.18
申请号
JP19970297390
申请日期
1997.10.29
申请人
TOSHIBA CERAMICS CO LTD
发明人
WATANABE MASAYUKI
分类号
C30B15/26;C30B29/06;H01L21/208;(IPC1-7):C30B15/26
主分类号
C30B15/26
代理机构
代理人
主权项
地址
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BIOLOGICAL INFORMATION MEASURING INSTRUMENT