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发明名称
METHOD AND APPARATUS FOR OPTICAL INSPECTION
摘要
申请公布号
KR100185797(B1)
申请公布日期
1999.05.15
申请号
KR19950038114
申请日期
1995.10.30
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
TAKAMOTO, KENJI;NISHII, KANJI;ITO, MASAMI;FUKUI, ATSUSHI
分类号
G01B11/00;G01N21/88;G01N21/896;G01N21/952;G01N21/958;(IPC1-7):G01N21/88
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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