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发明名称
PLASMA PROCESSING APPARATUS COMPRISING MEANS FOR GENERATING ROTATING MAGNETIC FIELD
摘要
申请公布号
KR100179663(B1)
申请公布日期
1999.05.15
申请号
KR19930011386
申请日期
1993.06.22
申请人
DAIHEN CORPORATION;TOKYO ELECTRON LIMITED
发明人
KURONO, YOICHI;KUBOTA, MASAMI;YOSHIKI, HIROYUKI;TANIGUCHI, MICHIO
分类号
H01J37/32;(IPC1-7):H05H1/46
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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