Air bearing with locally fixed and movable bearing bodies

摘要

The air bearing with a locally fixed and a moving bearing body (2,4), has at least one air gap formed between the two bearing bodies and a supply line (8) for compressed air for opening gap. The supply line is connected with a supply source for the supplied air. The supply line has a thermal through flow measuring unit for measuring the throughput, and a valve (16) for adjusting the throughput.