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发明名称
CAPPED POROUS THIN FILMS
摘要
申请公布号
EP0914494(A1)
申请公布日期
1999.05.12
申请号
EP19970932677
申请日期
1997.07.23
申请人
THE GOVENORS OF THE UNIVERSITY OF ALBERTA INDUSTRY LIAISON OFFICE;ALBERTA MICROELECTRONIC CORP
发明人
ROBBIE, KEVIN, JOHN;BRETT, MICHAEL, JULIAN
分类号
C23C14/24;B81B1/00;C23C14/22;H01L21/203;(IPC1-7):C23C14/22
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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