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发明名称
Method of forming a trench isolation structure utilizing composite oxide films
摘要
申请公布号
EP0893824(A3)
申请公布日期
1999.05.12
申请号
EP19970310091
申请日期
1997.12.15
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
PARK, MOON-HAN;HONG, SUG-HUN;SHIN, YU-GYUN
分类号
H01L21/76;H01L21/762;(IPC1-7):H01L21/762;H01L21/310;H01L21/316
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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