Rohrförmiger Transportarm

摘要

The system includes a container with a gas inlet (2) and a gas outlet (6), a cathode serving as substrate holder and connected to a HF source, and an anode (3) fo laminar construction and at earthed potential. The surface of the anode has stepped zones (8) which are parallel to the cathode and are arranged at different distances respectively from the cathode. The distance decreases toward the gas outlet. Pref. the electrodes are square, with dimension up to 50 cm. The gas inlet and outlet are at opposite ends of the container. USE/ADVANTAGE - Semiconductor module prodn. Uniform etching rate; stable plasma,