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发明名称
Apparatus for and method of evaluating multilayer thin films
摘要
申请公布号
EP0650030(B1)
申请公布日期
1999.05.12
申请号
EP19950100378
申请日期
1990.09.24
申请人
MITSUBISHI DENKI KABUSHIKI KAISHA;JASCO CORPORATION
发明人
NISHIZAWA, SEIZI;TAKAHASHI, TOKUZI,;FUKAZAWA, RYOICHI;HATTORI, RYO
分类号
G01B11/06;(IPC1-7):G01B11/06
主分类号
G01B11/06
代理机构
代理人
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地址
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