发明名称 |
Method of removing surface protrusions from thin films |
摘要 |
A method for removing a surface protrusion projecting from a layer of a first material deposited on a surface of a substrate. In accordance with one embodiment of the invention, a layer of a second material is applied on the layer of first material. A sufficient quantity of the second material is removed to expose the surface protrusion. The first material exposed through the surface protrusion is then removed.
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申请公布号 |
US5902491(A) |
申请公布日期 |
1999.05.11 |
申请号 |
US19960726955 |
申请日期 |
1996.10.07 |
申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
CARPENTER, CRAIG M.;ALWAN, JAMES J. |
分类号 |
B32B3/26;B44C1/22;C23C14/58;H01J9/00;(IPC1-7):H01L29/12;H01L29/06 |
主分类号 |
B32B3/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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