PLASMA TREATING DEVICE,申请号JP19970307919-传众专利搜索

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发明名称	PLASMA TREATING DEVICE
摘要
申请公布号	JPH11126699(A)	申请公布日期	1999.05.11
申请号	JP19970307919	申请日期	1997.10.21
申请人	TOKYO ELECTRON YAMANASHI LTD;JAPAN SCIENCE & TECHNOLOGY CORP	发明人	HAMA KIICHI
分类号	H05H1/46;C23C16/50;C23F4/00;H01J37/32;H01L21/205;H01L21/302;(IPC1-7):H05H1/46;H01L21/306	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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