发明名称 Flüssigkeitsabgabe und Verdampfungssystem
摘要 <p>An improved vaporization system includes an automated valve and positive displacement pumping system using a pair of pumps operating in opposition to one another to provide continuous and constant volumetric flow at a constant predetermined pressure to an improved vaporizer using a stack of heated disks to flash vaporize the liquid. The valves are improved by providing one way flow. <IMAGE></p>
申请公布号 DE69228847(D1) 申请公布日期 1999.05.12
申请号 DE1992628847 申请日期 1992.07.29
申请人 MKS INSTRUMENTS INC., ANDOVER, MASS., US 发明人 EWING, JAMES H., LEXINGTON, MA 02173, US
分类号 F17C7/04;B01D1/00;B01D3/06;B01J7/00;C23C16/44;C23C16/448;F04B1/00;F04B1/34;F04B15/08;F04B43/08;F04B43/107;F16K41/10;(IPC1-7):B01D3/06;F04B43/00;F04B43/10;B01D1/22;F04B7/00;F04B11/00;F22B27/14 主分类号 F17C7/04
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