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发明名称
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH11126780(A)
申请公布日期
1999.05.11
申请号
JP19970292635
申请日期
1997.10.24
申请人
TOKIN CORP
发明人
OBONAI FUMIAKI
分类号
H01L29/73;H01L21/329;H01L21/331;H01L29/732;(IPC1-7):H01L21/329
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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