| 摘要 |
<p>PROBLEM TO BE SOLVED: To adjust the position of the sample holding section of a stage for high vacuum by moving the section, without providing any mechanism for driving the stage for high vacuum in a high vacuum chamber in which the sample supporting section is provided. SOLUTION: A stage for high vacuum is provided with a connecting arm 4, which is extended in an x-axis direction perpendicular to a partition wall 2 dividing a high vacuum chamber A1 and a low vacuum chamber A2 from each other through an arm through-hole 3 formed through the wall 2, an X-Y table 8 which supports the part of the arm 4 staying in the low vacuum chamber A2, a panel 14 for forming an orifice which is arranged adjacent along the wall 2 at an interval Sp from the wall 2 to form an orifice as an air flow passage, and a pipe member 13, which covers the outer peripheral surface of the arm 4 with an interval Sa from the outer peripheral surface to form an orifice as an air flow passage.</p> |
