发明名称 RF/VHF plasma diamond growth method and apparatus and materials produced therein
摘要 Processes are disclosed for performing non-microwave, non-arcjet plasma-assisted chemical vapor deposition of diamond in which substantially no particles impact the growing diamond surface with energies sufficient to prevent the growth of diamond. The energies of the particles are limited by selecting frequency, pressure, magnetic fields, electrical bias, or a combination thereof to the deposition region of the chamber. Diamond materials formed by these processes are also disclosed.
申请公布号 US5902563(A) 申请公布日期 1999.05.11
申请号 US19970960929 申请日期 1997.10.30
申请人 PL-LIMITED 发明人 PINNEO, JOHN M.
分类号 B01J19/12;C23C16/27;C23C16/509;C30B25/10;(IPC1-7):B01J3/06 主分类号 B01J19/12
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