Flow controller, parts of flow controller, and related method

摘要

PCT No. PCT/US95/15157 Sec. 371 Date Oct. 2, 1997 Sec. 102(e) Date Oct. 2, 1997 PCT Filed Nov. 20, 1995 PCT Pub. No. WO96/21182 PCT Pub. Date Jul. 11, 1996A mass fluid flow controller has a valve which is controlled by a controller rod structure which is substantially pivotally mounted on a metallic diaphragm which stretches and unstretches with the movement of the rod structure. In the relationship between the controller rod structure and a ball which acts as a gate-member for the valve, an elongated stem rod having a sleeve about it may be used in fixing the ball to the controller rod structure. The stem rod may be mounted by fixing it to the elongated sleeve, a distance from the gate-member side of the controller rod structure that is substantially greater than the distance of the position of the ball from the gate-member side of the controller rod structure.