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发明名称
METHOD FOR EVALUATING SEMICONDUCTOR SUBSTRATE WITH P-N JUNCTION DIODE
摘要
申请公布号
JPH11126809(A)
申请公布日期
1999.05.11
申请号
JP19970292983
申请日期
1997.10.24
申请人
NIPPON STEEL CORP
发明人
ISHIZAKA KAZUNORI
分类号
H01L21/66;H01L29/86;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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