ION IMPLANTATION DEVICE,申请号JP19970309287-传众专利搜索

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发明名称	ION IMPLANTATION DEVICE
摘要
申请公布号	JPH11126576(A)	申请公布日期	1999.05.11
申请号	JP19970309287	申请日期	1997.10.22
申请人	NISSIN ELECTRIC CO LTD	发明人	AOKI MASAHIKO;TANJIYOU MASAYASU
分类号	C23C14/48;H01J37/05;H01J37/317;H01J49/26;H01L21/265;(IPC1-7):H01J37/317	主分类号	C23C14/48
代理机构		代理人
主权项
地址

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