发明名称 |
Controlling engagement of a scanning microscope probe with a segmented piezoelectric actuator |
摘要 |
A scanning probe microscope includes a segmented piezoelectric actuator having a course segment and a fine segment, the outputs of which are combined to determine the movement of a distal end of the actuator, to which the probe is mechanically coupled. Movement of the probe tip, or a change in the level of its engagement with a sample surface is sensed by a detector, which generates a feedback signal. A correction signal, which is used to determine how the actuator should be moved to maintain a constant level of such engagement, is generated in a comparison circuit, which compares the feedback signal with a control signal. The correction signal is used to drive the fine segment of the actuator, while an integral of the correction signal is used to drive the coarse segment.
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申请公布号 |
US5902928(A) |
申请公布日期 |
1999.05.11 |
申请号 |
US19970867138 |
申请日期 |
1997.06.02 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CHEN, DONG;FLECHA, EDWIN;HAMMOND, JAMES MICHAEL;ROESSLER, KENNETH GILBERT |
分类号 |
G01B7/34;G01B7/00;G01B21/30;G01N37/00;G01Q20/04;G01Q30/06;G01Q70/00;(IPC1-7):G01B7/34 |
主分类号 |
G01B7/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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