| 摘要 |
PROBLEM TO BE SOLVED: To correct white defects with high accuracy by a simple method without increasing the scale of a series of equipments for coating, vapor deposition, sputtering or the like used for a hard mask in the process of correcting defects in an emulsion mask or the like. SOLUTION: In a method for correcting defects in an emulsion mask (A) or the like, for the defects of white defects such as pinholes and chipping in an image (C), etc., printed on an emulsion layer (b) of the emulsion mask (A), etc., a weak adhesive film as a removable adhesion preventing layer of a synthetic resin is stuck to the surrounding including the defects. The film is irradiated with a UV laser beams coinciding with the defects to remove the defects together with the adhesion preventing layer (d). After a light-shielding material is applied on the defects in the removed part, the adhesion preventing layer is peeled and removed, while remaining the light-shielding material in the defects. |
