| 摘要 |
The present invention relates to the electrical isolation of components within an integrated opto-electronic device where two or more active regions are optically coupled, for example by a waveguide. The device (101) comprises a distributed feed-back laser diode (102) and an electro-absorption modulator (104) fabricated on the same substrate (106). The laser diode and modulator are: separated by an electrical isolation region (118); linked optically across the isolation region by a waveguide (110); and capped by a ternary cap layer (116) through which ohmic contacts (124,128;126,130) are made to operate the components (102,104). The cap layer (116) extends to the isolation region (118) from which a grounding contact (140,142,146) is made to ground the cap layer (116) in the isolation region (118) and so electrically isolate the laser diode (102) and modulator (104) from each other.
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