SEALED CABINET FOR STORAGE OF SEMICONDUCTOR WAFERS

摘要

An apparatus is provided for storing capsules containing semiconductor wafers in a sealed clean environment. The apparatus includes a housing (10) having a plurality of vertically arranged shelves (36) for supporting a plurality of capsules (16), a load-in station through which capsules may be inserted for storage, and a transfer port (42) through which capsules stored in the apparatus can be retrieved. The apparatus also includes an elevator mechanism (32) for selectively positioning capsules placed at the load-in station on a shelf and for selectively moving capsules at the shelves to the transfer port. The apparatus can be sealed at the load-in station and the transfer port.